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Plasma Etching: Fundamentals and Applications (Series on

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This is the first of two books presenting the challenges and future prospects of plasma etching processes for microelectronics, reviewing the past, present and future issues of etching processes in order to improve the understanding of these issues through innovative solutions.

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Plasma Etching: An Introduction Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching …

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Aspheric Surface Figuring Using Plasma Assisted Chemical

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 · The plasma etching reactor chamber of claim 1 wherein said dielectric layer is a polytetrafluoroethane layer. 4. The plasma etching reactor chamber of claim 1 wherein said conductive layer and said dielectric layer are fixed in intimate contact with said walls by insulated screws.

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